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date: 15 June 2021

Abstract and Keywords

This article examines the harmonic detection of resonance (HDR) methods for micro- and nanocantilevers, with particular emphasis on theory and selected applications. Micro- and nanocantilevers have the potential to revolutionize physical, chemical, and biological sensing. Microcantilevers in particular are easily integrated into standard high-volume silicon manufacturing processes, making them relatively inexpensive and mass-producible. This article begins with an overview of basic transduction mechanisms applicable to micro- and nanocantilever-based systems. It then considers several detection schemes for measuring the static and/or dynamic response of micro- and nanocantilevers. It goes on to discuss electrostatic actuation and capacitive detection, how HDR works, and the differences between the mechanical and electrical responses of an electrostatically actuated microcantilever. Finally, it presents a number of applications for micro- and nanocantilevers, along with detection results for cantilevered multiwall carbon nanotubes.

Keywords: harmonic detection of resonance, nanocantilevers, sensing, microcantilevers, transduction mechanisms, electrostatic actuation, capacitive detection, resonance, multiwall carbon nanotubes

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