Show Summary Details

Page of

PRINTED FROM OXFORD HANDBOOKS ONLINE (www.oxfordhandbooks.com). © Oxford University Press, 2018. All Rights Reserved. Under the terms of the licence agreement, an individual user may print out a PDF of a single chapter of a title in Oxford Handbooks Online for personal use (for details see Privacy Policy and Legal Notice).

date: 25 August 2019

Abstract and Keywords

This article examines the harmonic detection of resonance (HDR) methods for micro- and nanocantilevers, with particular emphasis on theory and selected applications. Micro- and nanocantilevers have the potential to revolutionize physical, chemical, and biological sensing. Microcantilevers in particular are easily integrated into standard high-volume silicon manufacturing processes, making them relatively inexpensive and mass-producible. This article begins with an overview of basic transduction mechanisms applicable to micro- and nanocantilever-based systems. It then considers several detection schemes for measuring the static and/or dynamic response of micro- and nanocantilevers. It goes on to discuss electrostatic actuation and capacitive detection, how HDR works, and the differences between the mechanical and electrical responses of an electrostatically actuated microcantilever. Finally, it presents a number of applications for micro- and nanocantilevers, along with detection results for cantilevered multiwall carbon nanotubes.

Keywords: harmonic detection of resonance, nanocantilevers, sensing, microcantilevers, transduction mechanisms, electrostatic actuation, capacitive detection, resonance, multiwall carbon nanotubes

Access to the complete content on Oxford Handbooks Online requires a subscription or purchase. Public users are able to search the site and view the abstracts and keywords for each book and chapter without a subscription.

Please subscribe or login to access full text content.

If you have purchased a print title that contains an access token, please see the token for information about how to register your code.

For questions on access or troubleshooting, please check our FAQs, and if you can''t find the answer there, please contact us.